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光学仪器及设备
DRV-Z1人机工效学全高清FHD裸眼3D变倍观察
美国SONIX超声显微镜ECHO VS
发射扫描电子显微镜ReguluS
扫描电子显微镜FlexSEM 1000
扫描电子显微镜AeroSurf 15
场发射透射电子显微镜HF-3300
透射电子显微镜HT7800系列
球差校正扫描透射电子显微镜HD-2700
离子溅射仪MC1000
场发射扫描电镜热场式SU5000
测量/计量仪器
2D大视场测量显微镜TVM35
高精度光学测量显微镜Hawk Elite
工具测量显微镜Swift Pro Elite
尼康CNC影像测量VMZ-R3020
德国Werth三坐标测量机
Werth台式复合式光学三坐标测量机VideoCheck-IP
Werth台式复合式光学三坐标测量机ScopeCheck
Werth双频白光干涉白点测量传感器WIP
Werth自动寻边的测量机EasyScope 3D man
Werth高精度复合式光学三坐标VideoCheck IP Basic
制样/消解设备
Allied楔形电子显微镜制样夹具
Allied手工样品固定器
Allied自动磨抛机E-PREP 4™ (PH-4I™ )
Allied自动研磨抛光机MetPrep 3™
Allied自动研磨抛光机MetPrep
Allied自动注液机AD-5™
Allied双盘手动磨抛机TwinPrep 5™
Allied手动研磨抛光机MetPrep 1™
Allied手动研磨抛光机M-Prep 5™
Allied基材厚度测量仪X-PREP® VISION™
无损检测/无损探伤仪器
Werth计量型CT TomoScope L
Werth计量型CT TomoScope S
Werth计量型CT TomoScope S HA
Werth计量型CT TomoScope XL
Werth计量型CT TomoScope XL NC
Werth计量型CT TomoScope XS
尼康CT扫描工作站XTH450
尼康CT扫描工作站XTH225
尼康CT扫描工作站XTH320 LC
尼康X射线检测站XTV160
半导体行业专用仪器
化学开封机Elite Etch Cu ESD 7200
化学芯片开封机Elite Etch Cu 7100
化学芯片开封机Injector 7400
化学芯片开封机Mega Etch 7300
Nisene化学芯片开封机TotalProtect
Nisene化学芯片开封机JetEtch Pro
激光单粒子效应SEE测试仪
Nisene化学芯片开封机CuProtect
Nisene等离子芯片开封机PlasmaEtch
化学芯片开封机Elite Etch 7000
其他
布洛维通用硬度计DuraVision G5
洛式硬度计DuraJet G5
全自动显微维氏硬度计DuraScan G5
便携式齿轮洛式硬度计N7
便携式深孔内径硬度计N6P
相关仪表
Aberlink-Trimos关节臂坐标测量机
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产品系列
产品描述
The X-Prep® fixture adapter is also secured to the motorized stage on the X-Prep® Vision™, ensuring the measurement/tool control coordinates remain aligned when transferred between systems.
A library with over 130 materials (i.e., GaAs, InGaAs, SiC, Sapphire/Al2O3, InP, SiGe, GaN, photo-resist) is included with every system.
Meaurement & Observation - How it Works
IR light is focused onto a sample, and a unique signal based on the refractive index of the material is created. The return signal is analyzed by the software to produce a thickness value.
Meauring Below 10 μm Thickness
For applications requiring thinning to less than 10 μm, precise measurement is possible only by adding the visible light spectrometer accessory.
FEATURES
Multipoint scan or single-point thickness measurement | 10 microns to full thickness (1 mm) range of measurement (15 nm to 1 mm thick when configured with #15-51000 Spectrometer) | |
Motorized, automatic X/Y/Z (auto-focus) with <1s acquisition time | Automatic edge and corner detection aligns measurement grid with X-Prep® - including theta correction | |
Edge exclusion with X/Y input | Stage fitted with X-Prep® fixture adapter | |
"Drive to Coordinate" software navigation | Viewing of either 2D plot/map or 3D graph | |
Supplied with Allied proprietary X-Correct™ software | CCD camera (#15-50020) must be purchased separately if not purchasing Visible Light Spectrometer (#15-51000) | |
Roughness - 15 micron finish | 100 mm x 100 mm stage travel | |
Software automation extendable through .NET | Data export using standard Windows methods | |
One (1) year warranty | Dimensions: 14" W x 17" D x 19" H (355 x 431 x 483 mm) |